Measuring element diameter: 14.3 mm (no crepe) With constant pressure device (8.02±0.8 N) Parallelism 3 µm Measuring element diameter: φ14.3 mm (no crepe) With constant pressure device (8.02±0.8 N) Measuring range (mm): 0~25 Maximum allowable error (μm):±4 并行性(μm):3 平坦度(μm):1 等级(mm):0.01 信号:PPM-25B