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Operating unit mounting position: Side Feed method: CMH-13RM (standard micrometer) Stage surface (mm): 70 x 70 Movement amount (mm): ±6.5 Movement accuracy Straightness (μm): 2 Movement accuracy Parallelism during movement (μm): 20 Load capacity (N/kgf): 78.4(8) Movement direction: 2 directions of XY axis Movement amount of movement (mm): 0.5 Movement accuracy Straightness (μm): 2 Movement accuracy Parallelism during movement (μm): 20 Load capacity N(kgf): 78.4(8)
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