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Stage surface (mm): 70 x 70 Movement amount (mm): ±15 Movement accuracy Straightness (μm): 2 Movement accuracy Parallelism during movement (μm): 30 Load capacity (N/kgf): 39.2(4) Movement direction: 2 directions of XY axis Width (mm): 146.5 Height (mm): 55.5 Length (mm): 146.5 Feed screw: Precision screw Movement accuracy Straightness (μm): 2 Movement accuracy Parallelism (μm): 30 Load capacity N(kgf): 39.2(4)
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