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Operating unit mounting position: center Feed method: CMH-13RM (standard micrometer) Stage surface (mm): 70 x 70 Movement amount (mm): ±6.5 Movement accuracy Straightness (μm): 2 Movement accuracy Parallelism during movement (μm): 20 Load capacity (N/kgf): 78.4/8 Movement direction: 2 directions of XY axis Width (mm): 139.8 Height (mm): 33 Length (mm): 139.8 Movement amount per turn (mm): 0.5 Movement accuracy Straightness (μm): 2 Movement accuracy Parallelism during movement (μm): 20 Load capacity n(kgf):78.4(8)
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